Hi,
I would recommend AZ 400k, depending on your needs you may dilute it 1:3
(thick resists) or 1:4.
Kind regards

Harald


-----Original Message-----
From: Mac Daily
Sent: Thursday, August 18, 2005 10:57 PM
To: MEMS discussion
Subject: [mems-talk] G line positive resist - non TMAH developer

Hello Everyone,

Can anyone recommend a positive tone, G-line photoresist that does not use
TMAH as the developer.  I have a customer that needs such a material and we
don't manufacture one.