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MEMSnet Home: MEMS-Talk: Polyimide etch
Polyimide etch
2005-07-25
kris
2005-08-22
kris
Polyimide etch
kris
2005-08-22
Hello All,

I am trying to etch PI2611 of about 14 microns over
the gold bond pads. The bondpads were electroplated. I
am using Al mask for the polyimide etch. After the
etch i have observed that the strings of polyimide
coming off along the preiphery of the bond pads. These
strings appear to be thinner compared to the original
polyimide layer. I was wondering if anyone has
encountered similar kind of problems??

Please provide me any suggestions on this.

Thanks
Kris
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