Dear Anthony

 i hope there are many ways. You are not getting voltage upon appling
force (apply variable force),i feel is due to polydoamin nature of as
grown film. Pole the film and apply variable force you will get
something. second do dielectric measuremnt with temperature the
transition temperature anomaly will give the idea. Hystersis loop
measurement will also give idea about the nature ( if PSZT is
ferroelectric).

 Gurvinder

> Message: 2
> Date: Sat, 20 Aug 2005 14:22:02 +1000
> From: "Anthony Holland" 
> Subject: [mems-talk] piezoelectric test
> To: 
> Message-ID: 
> Content-Type: text/plain; charset=US-ASCII
>
> I am characterising my sputtering process for depositing piezoelectric
> PSZT films.
> Please advise of a basic test, for this or other piezoelectric films,using
> electrodes to measure voltage and varying force on the films to see if the
> deposited films are piezoelectric.
> I have tried some tests but these have been inconclusive.
> Too much force was required and the samples of PSZT on Si substrates were
> damaged.