Hi, Everyone,
I am planning to electroplating copper on my mems
device. The copper needs to fill up trench of 10 micon
deep and 20 to 50 micron wide.

But I have no prior experience of eplating. Can anyone
give me some idea about how to setup the equippments,
perform the procedure.

Right now I have EPI E-Brite-Ultra Cu solution in
hand.

Any suggestion will be highly appreciated.
Thanks.
J.J. Wang