Yuzhu,

It may worth to take a look at this paper about a plasma/wet combined Cu
etch...

Yours sincerely,

Isaac Chan, Ph.D.
University of Waterloo


On Wed, 24 Aug 2005, Yuzhu Li wrote:

>
> Hi, anyone know a copper wet etch that gives small side etch? need to
> etch about 1um copper but need to control sideetch: several micron's
> sideetch is not acceptble...