Hi Erkin

  Look up processes involving UV hardening your PR and then placing it under
elevated temperatures in order to crosslink the polymers.  This should
prevent the first layer of PR from dissolving when the second layer of PR is
deposited.

Phil Tabada

>From: "erkin seker" 
>Subject: [mems-talk] MEMS switch contact dimple
>Date: Wed, 31 Aug 2005 09:46:31 -0400
>
>Hi,
>
>I am trying to build MEMS DC switches using both cantilevers and bridges.
>I want to fabricate a contact dimple using a bilayer photoresist process.
>I could get the dimple topography I wanted on the sacrificial layer by
>consecutively spinning and patterning two layers of AZ4110 in the past.
>However, now when I spin the second layer, it seems to dissolve the first
>layer where the dimple indentation is.
>
>Does anybody have a relatively straight-forwards recipe for fabricating
>contact dimples?