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MEMSnet Home: MEMS-Talk: MEMS switch contact dimple
MEMS switch contact dimple
2005-08-31
erkin seker
2005-09-01
Phillipe Tabada
2005-09-01
David Nemeth
Surface Planarization
2005-09-05
erkin seker
2005-09-01
Lou Chomas
2005-09-01
[email protected]
2005-09-01
Bill Moffat
MEMS switch contact dimple
[email protected]
2005-09-01
Don't know if this will help you too much, but when doing mult-etch DRIE,
I hard-baked the first layer (5740) at 170C for 2 hours. Turned it black,
but it was impervious to any other developers (and it held up for
through-wafer etching ~ 650 microns).

Mike
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