Xuemei,
Did you deposit both the Ti and Ag in the same session without breaking
vacuum? It works for me. If you break vacuum, the adhesion layer oxidizes
and doesn't work.
You can seed the Si with Pd and uses elecroless silver. It's not as good but
works.
Shay

-----Original Message-----
From: wangx
Subject: [mems-talk] Poor adhesion between Ag and Si

Dear MEMS community:
Could any of you give me some suggestion on how to improve the adhesion
between Ag and Si? I tried  a thin layer of Cr or Ti by PVD, but it did not
really work, cause the Ag layer peeled off easily when i did some
electrochemical experiment. Could you give me some detailed information or
parameters, if you have the corresponding experiences. Thanks in advance!