If you were done with the following two points, the film's adhesion should
be good,

1. Plasma descum before any deposition
2. Deposit Cr or Ti and then Ag in the same run of the deposition.

If the adhesion is good, the Ag film peering off might be caused by the
electrochemical reaction, which the adhesion layer was sacrificed as anode.

Good luck,

Hongjun Zeng, PhD
MEMS/Nano Scientist
Nanotechnology core facility
University of Illinois at Chicago

-----Original Message-----
From: wangx
Subject: [mems-talk] Poor adhesion between Ag and Si

Dear MEMS community:
Could any of you give me some suggestion on how to improve the adhesion
between Ag and Si? I tried  a thin layer of Cr or Ti by PVD, but it did
not really work, cause the Ag layer peeled off easily when i did some
electrochemical experiment. Could you give me some detailed information
or parameters, if you have the corresponding experiences. Thanks in
advance!