MEMS-talk

News	MEMSnet Home: MEMS-Talk: Rép. : [mems-talk] Oxidize Silicon Rép. : [mems-talk] Oxidize Silicon 2005-09-09 Laetitia Philippe Re:Rép.: [mems-talk] Oxidize Silicon 2005-09-09 [email protected] Re: Rép. : [mems-talk] Oxidize Silicon 2005-09-09 Jim Beall Re: Rép. : [mems-talk] Oxidize Silicon 2005-09-09 mizur Rép. : [mems-talk] Oxidize Silicon Laetitia Philippe 2005-09-09 Hallo Chen, you can do a thermal oxidation, typically 1100C for one hour under oxygen atmosphere Dr Laetitia Philippe Electrochemistry and Micro-patterning Group EMPA reply
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