Dear colleagues,

I am working on deep x-ray lithography in PMMA up to 1 cm and I am having
problems with rough surfaces. (Often bubble like structures though I don't
overexpose).

I am trying to find out more about PMMA radiation damage and PMMA
development in very deep structures. Especially effects occuring when one
overexposes or exposes with high ratio (gasing out, gas diffusion speed in
PMMA etc.) are things I would be very interested in!

Can anyone help me find appropriate literature?
Can anyone share their own experiences?
I would also like to get in contact with people doing experiments in the
same field.

Best regards

Georg

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Georg Aigeldinger, Research Associate
Center for Advanced Microstructures and Devices, CAMD
Louisiana State University
Baton Rouge, LA 70803, USA