Hi Chen,
gold and Silicon have a eutectic point at 363 C so the gold will disolve in
the silicon at any temperature higher than that.
Shay
----- Original Message -----
From:
To: "General MEMS discussion" ; "Laetitia Philippe"
Cc:
Sent: Friday, September 09, 2005 6:13 PM
Subject: Re: Rép. : [mems-talk] Oxidize Silicon
> I have Gold pattern on the sample and meling point of Gold is 1064oC.
> if I want to do it at 1000oC or 900oC, what should be the time by your
> expection?
> I do not need to be accurate. 20-50nm of SiO2 is fine
>