There is a possibility to oxidize silicon in hot nitric acid (115°C). After 10
minutes we measured a SiO2 thickness of about 30 nm. I don't know what will
happen to gold but theoretically it should not be affected.

Best

mic

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of [email protected]
Sent: Freitag, 9. September 2005 18:13
To: General MEMS discussion; Laetitia Philippe
Cc: [email protected]
Subject: Re: Rép. : [mems-talk] Oxidize Silicon


I have Gold pattern on the sample and meling point of Gold is 1064oC. if I want
to do it at 1000oC or 900oC, what should be the time by your expection? I do not
need to be accurate. 20-50nm of SiO2 is fine