Brubaker,

Do you just want th density of novolak, or novolak + DQ? Clariant won't
give out the exact percentage of novolak or DQ present in the resist. I
presume you have checked out their MSDS and data sheet already? I have a
textbook on AZ resist. Perhaps it records some data you need to know. I'll
have a look and see what I can find out for you.

Yours sincerely,

Isaac Chan, Ph.D.
University of Waterloo


On Tue, 13 Sep 2005, Brubaker Chad wrote:

> I would have thought this to be a fairly simple value to discover, but
> after some pretty extensive searches on the internet, I have to admit
> I'm coming up empty.
>
> Does anybody here happen to know the density of positive photoresist
> solids (novolak)?
>
> I'm curious, because I'm trying to determine the actual efficiency of a
> spray coating system.  My specific case:
>
> I am able to spray coat a 100mm wafer with a 5um layer using 230ul of
> AZP4620.  AZP4620 is stated as being 41% solids, but I believe this is
> on a weight/weight basis. It is a simple enough calculation to determine
> the volume of the resist coat (0.039 ml), but I have no direct
> correlation between this and the actual amount of resist dispensed. The
> only hint I have is that the specific gravity of PGMEA is 0.926, and the
> specific gravity of AZP4620 is 1.08.  Unfortunately, I cannot assume
> additive densities, since the process of the resin entering solution may
> modify the overall density of the system.
>
> Does anybody have any information?
>
> Best Regards,
> Chad Brubaker