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MEMSnet Home: MEMS-Talk: Density of Novolak resist solids
Density of Novolak resist solids
2005-09-13
Brubaker Chad
2005-09-14
Isaac Wing Tak Chan
2005-09-15
[email protected]
Density of Novolak resist solids
[email protected]
2005-09-15
Hello Isaac,

I am using AZ photoresist now and I want to know more about it.
So I am wondering can you tell me which textbook discussing AZ photoresit.
Thanks

chengsheng


On Wed, 14 Sep 2005, Isaac Wing Tak Chan wrote:

> Brubaker,
>
> Do you just want th density of novolak, or novolak + DQ? Clariant won't
> give out the exact percentage of novolak or DQ present in the resist. I
> presume you have checked out their MSDS and data sheet already? I have a
> textbook on AZ resist. Perhaps it records some data you need to know. I'll
> have a look and see what I can find out for you.
>
reply
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