Bake/anneal temperature and time is really critical. I guess you use two
coats. What is your process in detail? You should cool down samples very
slowly after baking.
 Tolga

 On 9/19/05, Rajib mukherjee  wrote:
>
> Hi all,
>
> I have a PZT/PT/Pt/Ti/SiO2/Si layer sequence.I need to test the
> piezoelectric/ferroelectric nature of the film.Is there any method to poll
> and test the layer without depositing the top electrode? and can anyone
> suggest how the C-V curves will look like for this since the P-E curves
> are
> hard to obtain with a keithley measurement system. And I have a lot of
> surface cracks on my PZT layer deposited by solgel after annealing (using
> the F2 mitsubishi precursor solution). If somebody suggests a solution for
> these problems it will be greatly appreciated.