First, I would like to know the possible water uptake and permeability of water
in HMDS coatings on silicon (w. native oxide), silicon nitride, and gold. I'm
using a 5 min exposure to the HMDS on dehydrated surfaces i.e. same treatment
for all the materials.

Secondly, I have heard that HMDS shouldn't have any effect on gold but when
spinning resist on gold coated wafers, the HMDS improves adhesion a lot compared
to fx wafers coming from a 200 C furnace or a plasma asher (+100 C+low
pressure). Any suggestions to what might happen on the gold?

Thanks
Peter