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MEMSnet Home: MEMS-Talk: insulating Au electrodes
insulating Au electrodes
2005-09-23
[email protected]
2005-09-23
shay kaplan
2005-09-23
Kirt Williams
2005-09-27
Hongjun-ECE
insulating Au electrodes
[email protected]
2005-09-23
Hello All:

I want to evaporate SiO2 by e-beam evaporator on Au electrodes to
insulate them as I need to operate the sample in buffer solution.

two questions:
1. what is the minimum thickness should be to protect Au electrodes
which is 150nm thick? operation voltage is small than 100mV.

2. SiO2 does not stick very well on the Au, is there a way to improve
the adherence of SiO2 on Au?

or you have any other better way to insulate the Au electrodes?

best

Yu Chen
reply
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