Yu Chen,
Try Parylene, BCB or some other organic coating since dielectrics such as
oxide, nitride, oxynitride etc do not stick well to gold and tend to crack
due to differences in TCE.

shay

-----Original Message-----
From: [email protected]
Sent: Friday, September 23, 2005 5:08 PM
To: General MEMS discussion
Subject: [mems-talk] insulating Au electrodes

Hello All:

I want to evaporate SiO2 by e-beam evaporator on Au electrodes to
insulate them as I need to operate the sample in buffer solution.

two questions:
1. what is the minimum thickness should be to protect Au electrodes
which is 150nm thick? operation voltage is small than 100mV.

2. SiO2 does not stick very well on the Au, is there a way to improve
the adherence of SiO2 on Au?

or you have any other better way to insulate the Au electrodes?