Hi Liu,

> I am wondering if some of you used SU8 film before. Somebody told me some
> company sells thin film of SU8 for photolithography but forgot detailed
> information. The film can be used like tape. Thanks a lot in advance.

Sorry for the late response. Due to the lack of commercial available SU-8
dry-film resist in the way we needed, we started some work to produce SU-8
sheets on our own (see appended references). This films could be laminated
on a substrate or onto it-self (so not really "used like tape"). Also we
stopped further work in self-producing SU-8 films there could be three
hints:

- A spin-off company out off the university (Jobst Technologies GmbH) could
be a good address, to ask if they will continue this work and perhaps have
some material available, info at www.jobst-technologies.com

- A person from MicroChem Corp. asked me in 2004 about our work and showed
me some sample sheets they planed to make commercial available until the end
of 2004. But I did not hear any news about this so far, on their company
webpage (www.microchem.com) I can't find anything about it.

- TOKYO OHKA KOGYO CO., LTD. offers a photoresist film, called TMMR S2000,
which I expect is SU-8 like, see www.tok.co.jp/products/TMMR-e.htm

Best regards
Jochen

Refs:

J. Kieninger, G. Jobst, I. Moser, G. A. Urban
3D Microfluidic Devices for Screening Applications by Laminating SU-8 Films
7th MipTec 2004, Basel, 2004, 101

Jochen Kieninger, Gerhard Jobst, Günter Igel, Isabella Moser, Gerald Urban
3D Polymer Microstructures by Laminating SU-8 Films
Proceedings of µTAS 2004, Volume 2, Malmö, Sweden, 2004, 363-365

--

Dipl.-Ing. Jochen Kieninger

 \O_    phone: +49 761 203 7265
  |     fax: +49 761 203 7262
 / \    mail: [email protected]