Dwayne,

It is possible to bond PDMS to cyclo-olefin and to PMMA through the use
of a capacitively induced oxygen plasma.  However, care must be taken
with the plasma system used.  Most plasma systems will also begin to
etch the surface of the material, especially when using an oxygen plasma
on organic materials.

Instead, the use of a dedicated system specifically intended for plasma
activation for bonding should be used.  Here are a couple references for
the use of plasma activation for cyclo-olefin and PMMA bonding(I will
email the PDF documents to you in a separate email):

Mizuno, J., et. Al "Cyclo-Olefin Polymer Direct Bonding Using Low
Temperature Plasma Activation Bonding", Proceedings of the 13th
International Conference on Solid-State Sensors, Actuators, and
Microsystems, Seoul, Korea, June 5-9, 2005

Glinsner, T., et. Al "Fabrication of Novel Type Microfluidic Devices by
Hot Embossing Technology," Proceedings of the 9th International
Conference on the Commercialization of Micro and Nano Systems, Edmonton,
Alberta, Canada, 29 August - 2 September 2004

Best Regards,
Chad Brubaker

-----Original Message-----
From: Dwayne Dunaway
Sent: Tuesday, September 27, 2005 3:06 PM
To: General MEMS discussion
Subject: [mems-talk] bonding PDMS to plastics

Hello,

Does anyone know if it is possible to bond PDMS to PMMA or polyolefin
using oxygen plasma?  Are there other bonding techniques?

Thanks,

Dwayne Dunaway