Hi,

You can have a descum process before the metal deposition. For your case, I
think you'd better do the descum before the high temperature bake. If there
is something dirty at the developed place, high temperature will make it too
strong to be removed by standard descum.

Another option is to choose Cr as the adhesion layer, but never tried on
PMGI. Please kindly let me know if it work for you since I’m really curious.

Good luck,

Hongjun Zeng, PhD

-----Original Message-----
From: Giuliano Gregori
Sent: Friday, September 30, 2005 5:40 PM
To: [email protected]
Subject: [mems-talk] Gold on PMGI

Hello,

I'm trying to deposit a 0.5 micron layer of titanium/gold on a portion
of a PMGI mesa, but after the lift-off there are no metals left.
I use titanium only to improve the adhesion between metal and resin.
Note that the PMGI is previously baked at 230 °C for 5 minuts and
reflowed at 300 °C for 7 minuts.
I wonder whether anybody has an idea how I could increase the adhesion
between PMGI and metals.