Hi polly,

BHF:glycerol 2:1 etches aluminium with a selectivity of 0.006 towards thermal
SiO2,
HF vapor phase etching etches aluminium with selectivity of 0.002. Check out the
publications and application on idonus.com.

Best,

Michael

-----Original Message-----
From: polly
Sent: Donnerstag, 6. Oktober 2005 13:54
To: [email protected]
Subject: [mems-talk] how to etch SiO2 without etching underlying Aluminum

I would like to know what are the etchants for etching SiO2 without etching
underlying ALuminum