I have three questions:

1.    Does anyone know of a MEMS laboratory with the capability to
deposit CVD tungsten?

2.    It is possible to directly deposit porous, CVD tungsten?

3.    Does anyone know of an method which can anisotropically etch
tungsten through a mask to a large depth (over several microns deep)
with near verical sidewalls?

--
Rich Koba
FMI
Waltham, MA
(781) 684-4197