Use Pad Etch 4 from Ashland. See JMEMS Etching for Micromachining Processing
II paper online for etch rates.
    --Kirt Williams

----- Original Message -----
From: "polly" 
To: 
Sent: Thursday, October 06, 2005 4:54 AM
Subject: [mems-talk] how to etch SiO2 without etching underlying Aluminum

>
> I would like to know what are the etchants for etching SiO2 without
> etching underlying ALuminum