Hi Noemi,
         If your 9% PMMA is currently in chlorobenzene solvent, then it is
standard procedure to reduce the viscosity by dilution with chlorobenzene.
I'd guess about 3 parts chlorobenzene to 1 part of 9% PMMA will be in the
proper range.
         -Bill

Subject: [mems-talk] PMMA dilution in chlorobenzene

         Dear all,

         I'm starting to work on PMMA 950K 9%.I'd like to reduce viscosity
to operate with a thickness (after spin coating) in the range of
100-200nm.I'd like to know if the procedure of dilution in chloro benzene is
a good solution or if it's raccomended to buy a new bottle with proper
viscosity.