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MEMSnet Home: MEMS-Talk: Gold/silicon adhesion in KOH/TMAH
Gold/silicon adhesion in KOH/TMAH
1998-05-27
Colin Ashruf
Gold/silicon adhesion in KOH/TMAH
Colin Ashruf
1998-05-27
Hi,
I am a PhD student working on a new electroless etch stop technique.
Could you help me with the following problem:
What kind of metal process do I need to get a gold layer on silicon
which survives KOH or TMAH at high temperatures. We have tried
evaporated Au/Cr but that comes of after a few hours?
If you can help me please e-mail: [email protected]
Thanks


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