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MEMSnet Home: MEMS-Talk: Question about metallization II
Question about metallization II
2005-10-18
Christopher Tan
Question about metallization II
Christopher Tan
2005-10-18
I would like to repost to the MEMS community if anyone has ever done
metallization of the Ti-Pt-Au system on Si, subjecting later the wafer to
temperatures of 800C and if they did, what diffusion barriers were utilized.

Christopher Tan

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