I am looking for materials properties for silicon nitride thin films,
such as those produced by CVD, PECVD, argon sputtering or reactive
sputtering.  Does anyone know the measured thermal expansion
coefficient, and the measured thermal conductivity?

Thanks
--
Richard Koba
Foster-Miller, Inc.
195 Bear Hill Road
Waltham,  MA  02154-1196
781-684-4197
fax:  781-290-0693