I had the exact same problem 3-4 years ago. I found that GBL and =
Cyclopentanone is not compatible with a rubber syringe.=20
I solved the problem by using a PP or PE syringe without the rubber. It =
can be reused, but you must be careful not to let particulates from =
dried SU-8 get into the syringe.
=20
Jacques Jonsmann

________________________________

Fra: [email protected] p=E5 vegne af riyaz pasha shaik
Sendt: fr 07-10-2005 15:59
Til: [email protected]
Emne: [mems-talk] Strange Effects in SU 8 2100..



Hai Every one,

           I am using a plastic syringe for depositing SU8 2100 resist
onto the wafer.. After the syringe is empty can I once again reuse the
syringe to refill SU 8 resist..?

The syringe has a rubber material where the residue's of SU 8 remained.
To clean this I have taken some SU 8 developer into syringe and kept in =
a
standing position so that the rubber material is rinsed with developer,
for a night (No need for such a long time but to check whether the =
rubber
material is affected with developer or not, But I havent found any =
changes
in the material)

After that I cleaned the syringe by rinsing with acetone and Iso =
proponal
and also with DI water.

I continued the same procedure for filling the resist into the syringe =
as
before.

I found very strange effects when I use the resist for my experiments..

Such as under exposure at one part of the wafer..

Does any one have any idea whether can we re-use the used syringe..?

Thanks for a reply to my post in advance

Regards,

Riyaz Pasha Shaik