There are some Silicon Nitride properties listed at the following web
address:

http://mems.isi.edu/mems/materials/materials.cgi?MODE=REVIEW&PAGE_SIZE=20&PAGE_N
UM=5&ORIENTATION=HORIZONTAL

Good luck.

Nigel Sharma

Email -- [email protected].
Web -- http://weber.u.washington.edu/~sharma/


On Wed, 27 May 1998, Rich Koba wrote:

> I am looking for materials properties for silicon nitride thin films,
> such as those produced by CVD, PECVD, argon sputtering or reactive
> sputtering.  Does anyone know the measured thermal expansion
> coefficient, and the measured thermal conductivity?
>
> Thanks
> --
> Richard Koba
> Foster-Miller, Inc.
> 195 Bear Hill Road
> Waltham,  MA  02154-1196
> 781-684-4197
> fax:  781-290-0693
>
>