I believe Capton (sp?) tape has a low vapor pressure. I use it in a
sputtering system with no problems getting to mid 10^-7 Torr.

Thomas

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Gary
Sent: Thursday, October 20, 2005 11:08 AM
To: General MEMS discussion
Subject: RE: [mems-talk] double-sided adhesive tape

Andrey,  Double sided tape in a high vacuum system could very well be
something of a problem as the components of the adhesive will in all
likelihood evaporate and contaminate the vacuum conditions. Gary

Gary Hillman