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MEMSnet Home: MEMS-Talk: adhesion layer between Cr and porous low-K materail
adhesion layer between Cr and porous low-K materail
2005-10-20
xiaodong wang
2005-10-20
Giuliano Gregori
adhesion layer between Cr and porous low-K materail
xiaodong wang
2005-10-20
Hi, All,

When I deposit 110 nm Cr to porous low-K(170nm  thick
SiCOH) material by E-Beam evaporation, Cr layer was
cracked due to stress.

I wonder if there is adhesion promoter which can help
reduce the stress and achieve no crack in Cr film.

Does anyone has the experience with this?

Thanks in advance.
reply
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