Kris,
     I developed the image reversal system at Yes and I am baffled at
the moment.  The only time I saw crystal problems was in very early
development when I was using liquid ammonia ( ammonia hydroxide) when I
got lots of ammonia salts.  Is it possible your resist has a high water
content and you are creating liquid ammonia, then salts.  Contact me
directly and we can go into this with more depth.
[email protected]


Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353