Andrey,

I used Kapton double-sided tape for ion implantation. People use it also
for evaporation as well as sputtering. Kapton tapes are known to withstand
at high temperature. I ordered one roll from www.kaptontape.com.

Best wishes,
Han


Date: Thu, 20 Oct 2005 14:17:51 +0400
From: 
To: [email protected]
Subject: [mems-talk] double-sided adhesise tape

 Hi,
It's common knowledge that double-sided adhesive tapes are used for dicing
and
drinding. But I have heard about its application for evaporation or
sputtering
as wafer mount. Has anybody such experiance? Would you mind to advise
anything
about it?

 Thank you in advance, Andrey.