Hi Jifeng:

I use a thin teflon-like layer to ease the release of PDMS samples from a mold.
I deposit this layer using the passivation step of a deep reactive ion etcher
(ASE from STS).

See for example:
D. Haefliger, M. Nordstrom, P.A. Rasmussen, A. Boisen, Microelectron. Eng. 78-79
(2005) pp. 88-92.

Best regards,
Daniel


-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Jeff chen
Sent: 11. oktober 2005 23:45
To: [email protected]
Subject: [mems-talk] How to release PDMS from Aluminum mold?

Hi, all,
 I am working on the PDMS related project.
Right now, I met a problem that it is not easy to release the cured PDMS
from the Aluminum mold.
Is there any way to do that easily? Like some reagent or a Teflon layer on
mold?