Message-Id:   

MonacoHi,

I am a PhD student working on a new electroless etch stop technique.

Could you help me with the following problem:

What kind of metal process do I need to get a gold layer on silicon

which survives KOH or TMAH at high temperatures. We have tried

evaporated Au/Cr but that comes of after a few hours?

If you can help me please e-mail:
0000,0000,C0C0[email protected]

Thanks


Try out Ti/W as a first layer. It works for Pt electrodes in KOH....

Wouter van der Wijngaart

Kungl. Tekniska H=F6gskolan     Tel:    +46 - (0)8 - 790 66 13

S3, Elektrisk m=E4tteknik       Fax:    +46 - (0)8 - 10 08 58   =20

100 44  Stockholm               Minicall:       +46 - (0)740 - 26 71 28=20

Sweden                  e-mail: [email protected]

http://www.s3.kth.se/instrlab/staff/wouterw.html