A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: deflection measurements
deflection measurements
1998-05-30
M.C. Federico Sandoval
deflection measurements
M.C. Federico Sandoval
1998-05-30
Dear sirs,

In the design of cantilever beams and doubly-supported beams many authors
have been used interferometric techniques to measure the deflection of
those microestructures. Could anyone E-mail me where I can buy an
optical microscope to measure vertical deflection?

Thanks in advance

Dr. F. Sandoval-Ibarra
Microelectronics Laboratory
INAOE, Puebla (Mexico)
Phone: + 52 (22) 47 20 11
Fax: + 52 (22) 47 05 17


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Tanner EDA by Mentor Graphics
University Wafer
MEMStaff Inc.