Michaela, generally a thin oxide will render SiO2 hydrophyic.  You can do
this with 1 NH40H;1H2O2;6 H2O at 60 C for about 15 minutes.  This is called
SC2 clean.  Gary

Gary Hillman
Service Support Specialties, Inc.

-----Original Message-----
From:   Wullinger, Michaela [SMTP:[email protected]]
Sent:   Monday, November 07, 2005 12:05 PM
To:     [email protected]
Subject:        [mems-talk] SiO2 hydrophilic enhanced?

hi all,
I'm thinking about ways to make SiO2 more hydrophilic.
What do you think about:
*HMDS?
*Temperature (heating)
*Other promoter?

Any hint is welcome