Michaela,
As Shay pointed out Plasma treatment would make SiO2 mort hydrophilic.
If plasma is not available, RCA treatment would also make it hydrophilic but
won't increase the surface energy as much as with plasma activation.
I am thinking on the lines of bonding.

Thanks
Sumant Sood
Belford Research.



-----Original Message-----
From: Shay Kaplan
Sent: Monday, November 07, 2005 1:32 PM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] SiO2 hydrophilic enhanced?

Micahela,
HMDS will make it hydrophobic.
Plasma treatment might help.
shay

-----Original Message-----
From: Wullinger, Michaela
Sent: Monday, November 07, 2005 7:05 PM
To: [email protected]
Subject: [mems-talk] SiO2 hydrophilic enhanced?

hi all,
I'm thinking about ways to make SiO2 more hydrophilic.
What do you think about:
*HMDS?
*Temperature (heating)
*Other promoter?

Any hint is welcome