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MEMSnet Home: MEMS-Talk: Lift off for oxide mask?
Lift off for oxide mask?
2005-11-07
Pete Kirby
2005-11-08
William Lanford-Crick
Lift off for oxide mask?
Pete Kirby
2005-11-07
Hi-

I was wondering if it is possible to do some sort of lift off process for
creating and oxide mask (2-3 um thick). I found wet etch do be terrible for
accuracy and we have been experiencing problems with our plasma etch
process for some time.

Just looking for an alternative. I am told it can not be done, but I figure
maybe some one may have tried it.

Thanks
Pete

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