Greetings,
Yes that will work with virtually any of the HD PI materials.
Some of their older materials are cheaper and work as well.
It takes some experimentation to form the bridge, make sure you have a clean
removal of the PI easier said than done
Kind Regards
Walter
www.elume.com
-----Original Message-----
From: Giuliano Gregori [mailto:[email protected]]
Sent: Monday, November 07, 2005 11:08 AM
To: General MEMS discussion
Subject: [mems-talk] HD-8820 Polyimide
Hi all,
I'd like to use polyimide as sacrificial layer for the fabrication of an
air-bridge.
I'll have to spin it on a SiO2 surface; on part of the top I'll have to
deposit gold and SiO2 again.
I was thinking to use HD-8820 polyimide and I wonder whether this is a
good solution.
Has anybody already used something similar ? Suggestions ???
Thanks in advance !
Giuliano