Greetings,
If you are still wondering ,a dry film such as mnf.by Dupont cannot be used
for MEMS because one cannot attain
 the geometry used in such devices as well as other sem'.s.PR is almost the
universal  solution
Kind Regards
Walter
www.elume.com

-----Original Message-----
From: steph champ [mailto:[email protected]]
Sent: Friday, November 04, 2005 9:18 AM
To: [email protected]
Subject: [mems-talk] Small survey about photolithography applied to MEMS
anddry-film photoresists ??

What particular attributes of photolithography result in this process being
used
almost universally to fabricate silicon MEMS devices?


When might dry-film photoresists be used advantageously in MEMS fabrication?


Thanks for all.