Chih,
A 3" 500um thick quartz wafer is not a problem to handle if you are used to
normal silicon wafer handling.
To clean it, you can use standard SC1 (H2O2/NH4OH/H2O) clean followed by
SC2(HCl/H2O2/H2O) clean process, normally used to clean silicon wafers of
contaminants. But yes, In case you need to cut the wafer into small pieces,
you will need a dicing saw; can't use a scribe.

Sumant



-----Original Message-----
From: Chih-Chieh Cheng
Sent: Tuesday, November 08, 2005 8:27 PM
To: [email protected]
Subject: [mems-talk] Suggestions needed for handling quartz wafer

Hi, everyone
 I never used quartz wafer as the substrate before and I've heard it is
extremely frangible. Does anyone know the tricks to handle quartz wafer? Do
I need to buy special tweezers for it? How do you clean it? I would be
appreciate it if any of you could share your insights on it. The
specification of my quartz wafer is 3" with thickness=500 um (ttv<10um)