When I processed 4" fragile wafers, we had many processing steps which
involved putting the wafer in a shallow glass beaker filled with some liquid
(photoresist developer, for example).  What would happen is that when we
released them, they would slide over and hit the side of the glass beaker
and break.

We switched to plastic beakers (we actually cut the bottoms off of plastic
tupperware), which eliminated this problem.  I would strongly recommend it.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA 20151

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Chih-Chieh Cheng
Sent: Tuesday, November 08, 2005 8:27 PM
To: [email protected]
Subject: [mems-talk] Suggestions needed for handling quartz wafer


Hi, everyone
 I never used quartz wafer as the substrate before and I've heard it is
extremely frangible. Does anyone know the tricks to handle quartz wafer? Do
I need to buy special tweezers for it? How do you clean it? I would be
appreciate it if any of you could share your insights on it. The
specification of my quartz wafer is 3" with thickness=500 um (ttv<10um)