Grate, Nelson, and Dunham patented this, still grinding through US
Patent Office.
Glen Dunham
Pacific Northwest National Lab
509 376 4397


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Vinodh Murali
Sent: Wednesday, November 09, 2005 1:33 PM
To: [email protected]
Subject: [mems-talk] Photosensitive PDMS

Hi all,
I know this topic has been discussed earlier. Some people have stated
about making PDMS photosensitive. Is there any publications on this
process? I'm trying to work with photosensitive PDMS or RMS-033. I tried
contacting the person who had sent an e-mail on this topic in Jan 05,
but I got no response. Any help on this would be greatly appreciated.
Thank you.