A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Can I deposit a DBR on the vertical wall to enhance the reflectivity?
Can I deposit a DBR on the vertical wall to enhance the reflectivity?
2005-11-11
刘恒
Can I deposit a DBR on the vertical wall to enhance the reflectivity?
刘恒
2005-11-11
Hi,everyone

I am trying to fabricate a square vertical cavity.First ,using the DRIE process
to etch the Si(100) plan(form a square vertical wall cavity),then using EPW to
polish the vertical cavity.My quesion is that can I deposit a DBR on the
vertical wall to enhance the reflectivity.

Thanks a lot for your help!
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
Process Variations in Microsystems Manufacturing
The Branford Group
Nano-Master, Inc.