You can contact Dr. Bhanwar Singh, Advanced Micro Devices (AMD), Sunnyvale, CA,
USA. He is a  well known authority in the field of CD Metrology & related
technology at bothe photo and etch level. His e-mail ID is [email protected].

Good luck.


jedidi nader  wrote:
Hello every body,

I have just started working on the control of the CD of the gate of CMOS
technology. I would like to know if you have some information or articles
dealing with the correlation between the non-uniformity whithin a wafer after
photo et that after etch ?

I thank you in advance.
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