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MEMSnet Home: MEMS-Talk: sputter SiO2
sputter SiO2
2005-11-16
[email protected]
2005-11-16
Richard Chang
2005-11-17
Giuliano Gregori
sputter SiO2
[email protected]
2005-11-16
Hello all:

I am going to try sputtering SiO2 on Au to insulate Au, maybe Si3N4.
does SiO2 stick on Au? or Si3N4 is better?
do I need to do anything to make it sticky?

I am going to sput SiO2 after e-beam lithography(PMMA as mask).

any suggestions are welcome.

best

Yu Chen


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