Check out this site.  Transene makes a chemical that will do the trick.

http://www.transene.com/etch_compatibility.html


Ad Hall
StarCryoelectronics
505-424-6454
[email protected]


-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Zhang Zhenfeng
Sent: Wednesday, November 16, 2005 5:08 PM
To: mems-talk
Subject: [mems-talk] Ti etchant but not etch SiO2

Dear All£¬
Do you know which etchant can etch Ti but not SiO2?